| 系列 Series | M102 | M103 | M105 | M106(WC) | M107 |
| 通光孔径 Recommended Aperture | 10mm | 10mm | 10mm | 10mm | 10mm |
| 动态特性 Dynamic Performance | |||||
| 重复精度 Repeatability | ＜22urad | ＜22urad | ＜22urad | ＜15urad | ＜15urad |
| 增益漂移 Gaindrift | 80ppm/K | 80ppm/K | 80ppm/K | 50ppm/K | 50ppm/K |
| 零点漂移 Offsetdrift | 30urad/K | 30urad/K | 30urad/K | 25urad/K | 25urad/K |
| 跟踪误差时间 Tracking error time | 0.22ms | 0.20ms | 0.17ms | 0.17ms | 0.15ms |
| 1%满行程阶跃响应时间 1% of full scale | 0.30ms | 0.28ms | 0.25ms | 0.25ms | 0.23ms |
| 10%满行程阶跃响应时间 10% of full scale | 0.80ms | 0.75ms | 0.70ms | 0.70ms | 0.66ms |
| 非线性度 Non-Linarity | < 0.9mrad | < 0.9mrad | < 0.6mrad | < 0.6mrad | < 0.6mrad |
| 老化漂移（8小时） Long-term Drift over 8 hours | ＜0.3mrad | ＜0.3mrad | ＜0.2mrad | ＜0.15mrad | ＜0.2mrad |
| 典型速度Typical Speeds | |||||
| 打标速度 Marking speed | 2000mm/s | 2500mm/s | 4000mm/s | 4000mm/s | 5000mm/s |
| 定位速度 Positioning speed | 10m/s | 12m/s | 15m/s | 15m/s | 20m/s |
| 光学特性 Optical Performance | |||||
| 扫描角度 Typical Deflenction | ±0.35rad | ±0.35rad | ±0.35rad | ±0.35rad | ±0.35rad |
| 接口协议 Interface | XY2-100 | XY2-100 | XY2-100 | XY2-100 | XY2-100 |
| 环境温度 Operationg Temperature | 10~40℃ | 10~40℃ | 10~40℃ | 10~40℃ | 10~40℃ |
| 储存温度 Storage Temperature | -20~60℃ | -20~60℃ | -20~60℃ | -20~60℃ | -20~60℃ |
| 电源要求 Power Requirements | ±15VDC,max2A | ±15VDC,max2A | ±15VDC,max2A | ±15VDC,max2A | ±15VDC,max3A |
| 重量 Weight | 1.9kg | 1.9kg | 1.9kg | 1.9kg | 1.9kg |
| 外形尺寸 Dimensions (L/W/H) | 118.2*100.7*98mm | 118.2*100.7*98mm | 118.2*100.7*98mm | 114*96.5*96.4mm | 118.2*100.7*98mm |
